Spar
Dry Etching for VLSI
Forfatter:
heftet, 2013
Engelsk
This book has been written as part of a series of scientific books being published by Plenum Press. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI.
- Forfatter
- A.J. van Roosmalen, J.A.G. Baggerman, S.J.H. Brader
- Opplag
- Softcover reprint of the original 1st ed. 1991
- ISBN
- 9781489925688
- Språk
- Engelsk
- Vekt
- 310 gram
- Utgivelsesdato
- 29.5.2013
- Antall sider
- 237
