Gå direkte til innholdet
Design for Manufacturability with Advanced Lithography
Spar

Design for Manufacturability with Advanced Lithography

Forfatter:
Engelsk
This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).
Opplag
Softcover reprint of the original 1st ed. 2016
ISBN
9783319373935
Språk
Engelsk
Vekt
310 gram
Utgivelsesdato
23.8.2016
Antall sider
164