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Design for Manufacturability with Advanced Lithography
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Design for Manufacturability with Advanced Lithography

Forfatter:
innbundet, 2015
Engelsk
This book introduces readers to the most advanced research results on Design for Manufacturability (DFM) with multiple patterning lithography (MPL) and electron beam lithography (EBL).
Opplag
1st ed. 2016
ISBN
9783319203843
Språk
Engelsk
Vekt
446 gram
Utgivelsesdato
23.11.2015
Antall sider
164