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Design and Manufacturing of Active Microsystems
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Design and Manufacturing of Active Microsystems

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle.
Opplag
2011 ed.
ISBN
9783642267383
Språk
Engelsk
Vekt
310 gram
Utgivelsesdato
21.3.2014
Antall sider
444