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Advanced MEMS/NEMS Fabrication and Sensors
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Advanced MEMS/NEMS Fabrication and Sensors

innbundet, 2021
Engelsk
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications.
Redaktør
Zhuoqing Yang
Opplag
2022 ed.
ISBN
9783030797485
Språk
Engelsk
Vekt
446 gram
Utgivelsesdato
13.10.2021
Antall sider
312