Tallenna
Ultraclean Surface Processing of Silicon Wafers
nidottu, 2010
englanti
This book thus opens the door to the manufacturing of reliable nanoscale devices and will be extremely useful for every engineer, physicist and technician involved in the production of silicon semiconductor devices.
- Alaotsikko
- Secrets of VLSI Manufacturing
- Kääntäjä
- T. Hattori, S. Heusler, J.P. Webb
- Toimittaja
- Takeshi Hattori
- Painos
- 1st ed. Softcover of orig. ed. 1998
- ISBN
- 9783642082726
- Kieli
- englanti
- Paino
- 310 grammaa
- Julkaisupäivä
- 7.12.2010
- Sivumäärä
- 616
