Tallenna
Ultra-Clean Technology Handbook
sidottu, 1993
englanti
Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int
- Alaotsikko
- Volume 1: Ultra-Pure Water
- Toimittaja
- Tadahiro Ohmi
- ISBN
- 9780824787530
- Kieli
- englanti
- Paino
- 1910 grammaa
- Julkaisupäivä
- 29.6.1993
- Kustantaja
- CRC Press Inc
- Sivumäärä
- 944
