Tallenna
Tribology Issues and Opportunities in MEMS
nidottu, 2012
englanti
Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization.
- Alaotsikko
- Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9–11 November 1997
- Toimittaja
- Bharat Bhushan
- Painos
- Softcover reprint of the original 1st ed. 1998
- ISBN
- 9789401061216
- Kieli
- englanti
- Paino
- 310 grammaa
- Julkaisupäivä
- 5.11.2012
- Kustantaja
- Springer
- Sivumäärä
- 655
