Tallenna
Toward Inertial-Navigation-on-Chip
This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes.
- Alaotsikko
- The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes
- Kirjailija
- Haoran Wen
- Painos
- 2019 ed.
- ISBN
- 9783030254698
- Kieli
- englanti
- Paino
- 446 grammaa
- Sarja
- Springer Theses
- Julkaisupäivä
- 25.9.2019
- Kustantaja
- Springer Nature Switzerland AG
- Sivumäärä
- 127
