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Theory and Application of Laser Chemical Vapor Deposition
Tallenna

Theory and Application of Laser Chemical Vapor Deposition

sidottu, 1995
englanti
In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system.
Painos
1995 ed.
ISBN
9780306449369
Kieli
englanti
Paino
446 grammaa
Julkaisupäivä
31.10.1995
Sivumäärä
396