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The Physics of Microfabrication
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The Physics of Microfabrication

The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years.
Painos
Softcover reprint of the original 1st ed. 1982
ISBN
9781489921628
Kieli
englanti
Paino
310 grammaa
Julkaisupäivä
26.6.2013
Sivumäärä
504