Tallenna
Subsecond Annealing of Advanced Materials
The thermal processing of materials ranges from few fem to seconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing.
- Alaotsikko
- Annealing by Lasers, Flash Lamps and Swift Heavy Ions
- Toimittaja
- Wolfgang Skorupa, Heidemarie Schmidt
- Painos
- Softcover reprint of the original 1st ed. 2014
- ISBN
- 9783319352879
- Kieli
- englanti
- Paino
- 310 grammaa
- Julkaisupäivä
- 23.8.2016
- Kustantaja
- Springer International Publishing AG
- Sivumäärä
- 321
