Silicon Sensors and Actuators
This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges.
- Alaotsikko
- The Feynman Roadmap
- Painos
- 2022 ed.
- ISBN
- 9783030801342
- Kieli
- englanti
- Paino
- 446 grammaa
- Julkaisupäivä
- 13.4.2022
- Kustantaja
- Springer Nature Switzerland AG
- Sivumäärä
- 997