Silicon Anodization as a Structuring Technique
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime.
- Alaotsikko
- Literature Review, Modeling and Experiments
- Kirjailija
- Alexey Ivanov
- Painos
- 1st ed. 2018
- ISBN
- 9783658192372
- Kieli
- englanti
- Paino
- 310 grammaa
- Julkaisupäivä
- 22.9.2017
- Kustantaja
- Springer
- Sivumäärä
- 316