Scanning Electron Microscopy

The aim of this book is to outline the physics of image formation, electron- specimen interactions, imaging modes, the interpretation of micrographs and the use of quantitative modes "e;in scanning electron microscopy (SEM). lt forms a counterpart to Transmission Electron Microscopy (Vol. 36 of this Springer Series in Optical Sciences) . The book evolved from lectures delivered at the University of Munster and from a German text entitled Raster-Elektronenmikroskopie (Springer-Verlag), published in collaboration with my colleague Gerhard Pfefferkorn. In the introductory chapter, the principles of the SEM and of electron- specimen interactions are described, the most important imaging modes and their associated contrast are summarized, and general aspects of eiemental analysis by x-ray and Auger electron emission are discussed. The electron gun and electron optics are discussed in Chap. 2 in order to show how an electron probe of small diameter can be formed, how the elec- tron beam can be blanked at high frequencies for time-resolving exper- iments and what problems have tobe taken into account when focusing.