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Precursor Chemistry of Advanced Materials
Tallenna

Precursor Chemistry of Advanced Materials

sidottu, 2005
englanti

Material synthesis by the transformation of organometallic compounds (precursors) by vapor deposition techniques such as chemical vapor deposition (CVD) and atomic layer deposition (ALD) has been in the forefront of modern day research and development of new materials.

Alaotsikko
CVD, ALD and Nanoparticles
Painos
2005 ed.
ISBN
9783540016052
Kieli
englanti
Paino
446 grammaa
Julkaisupäivä
29.9.2005
Sivumäärä
214