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Plasma-Surface Interactions and Processing of Materials
Tallenna

Plasma-Surface Interactions and Processing of Materials

sidottu, 1990
englanti

The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials.
Painos
1990 ed.
ISBN
9780792305842
Kieli
englanti
Paino
446 grammaa
Julkaisupäivä
31.1.1990
Kustantaja
Springer
Sivumäärä
558