Tallenna
Plasma Processing of Semiconductors
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
- Toimittaja
- P.F. Williams
- Painos
- Softcover reprint of the original 1st ed. 1997
- ISBN
- 9789401064866
- Kieli
- englanti
- Paino
- 310 grammaa
- Julkaisupäivä
- 12.10.2012
- Kustantaja
- Springer
- Sivumäärä
- 613
