Siirry suoraan sisältöön
Plasma Charging Damage
Tallenna

Plasma Charging Damage

In the 50 years since the invention of transistor, silicon integrated circuit (IC) technology has made astonishing advances. In state of the art silicon Ie manufacturing process, plasma is used in more than 20 different critical steps.
Kirjailija
Kin P. Cheung
Painos
Softcover reprint of the original 1st ed. 2001
ISBN
9781447110620
Kieli
englanti
Paino
310 grammaa
Julkaisupäivä
30.8.2012
Sivumäärä
346