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Outlook and Challenges of Nano Devices, Sensors, and MEMS
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Outlook and Challenges of Nano Devices, Sensors, and MEMS

This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things.

Toimittaja
Ting Li, Ziv Liu
Painos
Softcover reprint of the original 1st ed. 2017
ISBN
9783319845005
Kieli
englanti
Paino
310 grammaa
Julkaisupäivä
13.7.2018
Sivumäärä
521