Novel Silicon Based Technologies
Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemical vapor deposited silicon layers, technology and devices for silicon based three-dimensional circuits, integrated fabrication of micromechanical structures on silicon, micromachining of silicon for
- Alaotsikko
- Conference Proceedings
- Toimittaja
- R. A. Levy
- ISBN
- 9780792311126
- Kieli
- englanti
- Paino
- 588 grammaa
- Julkaisupäivä
- 31.1.1991
- Kustantaja
- Kluwer Academic Publishers
- Sivumäärä
- 292