Tallenna
Nanopositioning Technologies
nidottu, 2018
englanti
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning.
- Alaotsikko
- Fundamentals and Applications
- Toimittaja
- Changhai Ru, Xinyu Liu, Yu Sun
- Painos
- Softcover reprint of the original 1st ed. 2016
- ISBN
- 9783319795393
- Kieli
- englanti
- Paino
- 310 grammaa
- Julkaisupäivä
- 30.3.2018
- Kustantaja
- Springer International Publishing AG
- Sivumäärä
- 409
