Tallenna
Nanoimprint Lithography: An Enabling Process for Nanofabrication
Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes.
- Kirjailija
- Weimin Zhou
- Painos
- Softcover Reprint of the Original 1st 2013 ed.
- ISBN
- 9783662510865
- Kieli
- englanti
- Paino
- 310 grammaa
- Julkaisupäivä
- 23.8.2016
- Sivumäärä
- 249
