Tallenna
Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices
Proceedings of the NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies, Bad Windsheim, Germany, September 21-October 2, 1992
- Toimittaja
- O. Auciello, Jürgen Engemann
- Painos
- Softcover reprint of the original 1st ed. 1993
- ISBN
- 9789401047579
- Kieli
- englanti
- Paino
- 310 grammaa
- Julkaisupäivä
- 14.10.2012
- Kustantaja
- Springer
- Sivumäärä
- 633
