Siirry suoraan sisältöön
Modelling of Microfabrication Systems
Tallenna

Modelling of Microfabrication Systems

This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
Painos
Softcover reprint of hardcover 1st ed. 2003
ISBN
9783642055362
Kieli
englanti
Paino
310 grammaa
Julkaisupäivä
8.12.2010
Sivumäärä
270