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Modelling of Microfabrication Systems
Tallenna

Modelling of Microfabrication Systems

sidottu, 2003
englanti
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
Painos
2003 ed.
ISBN
9783540002529
Kieli
englanti
Paino
446 grammaa
Julkaisupäivä
13.6.2003
Sivumäärä
270