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Mems/Nems
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Mems/Nems

More than 100 coauthors from nearly 20 countries present clearly written, self-contained, accessible and comprehensive contributions with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Alaotsikko
(1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS
Painos
Softcover reprint of the original 1st ed. 2006
ISBN
9781489977397
Kieli
englanti
Paino
249 grammaa
Julkaisupäivä
23.8.2016
Sivumäärä
2094