Measurement Technology for Micro-Nanometer Devices
• Highlights the advanced research work from industry and academia in micro-nano devices test technology
• Written at both introductory and advanced levels, provides the fundamentals and theories
• Focuses on the measurement techniques for characterizing MEMS/NEMS devices
- Kirjailija
- Wendong Zhang, Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jingdong Chen, Liguo Chen, Dachao Li, Chenyang Xue
- ISBN
- 9781118717981
- Kieli
- englanti
- Julkaisupäivä
- 18.10.2016
- Kustantaja
- Wiley
