Magneto-Lithography

Meeting the need for a book that conveys the knowledge in a coherent fashion, this work introduces the principles and applications of magnetolithography and discusses it within the context of more established methods. As such, it includes chemical patterning and metal deposition, also on non-planar surfaces, while covering many applications, such as microelectronics and lab-on-a-chip.
The result is a balanced discussion of all the available methods together with their advantages and shortcomings for surface physicists, materials scientists, electrical engineers, and those working in the semiconductor industry.