Tallenna
Ion Implantation in Semiconductors
nidottu, 2011
englanti
In recent years great progress has been made in the field of ion implantation, particularly with respect to applications in semiconductors. International Conference on Ion Implantation in Semiconductors within the rather short time of one year since the first conference was held in 1970 in Thousand Oaks, California.
- Alaotsikko
- Proceedings of the II. International Conference on Ion Implantation in Semiconductors, Physics and Technology, Fundamental and Applied Aspects May 24–28, 1971, Garmisch-Partenkirchen, Bavaria, Germany
- Toimittaja
- Ingolf Ruge, J. Graul
- Painos
- Softcover reprint of the original 1st ed. 1971
- ISBN
- 9783642806629
- Kieli
- englanti
- Paino
- 310 grammaa
- Julkaisupäivä
- 25.12.2011
- Sivumäärä
- 508
