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Ion Implantation: Basics to Device Fabrication
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Ion Implantation: Basics to Device Fabrication

Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framework of microelectronics.
Kirjailija
Emanuele Rimini
Painos
Softcover reprint of the original 1st ed. 1995
ISBN
9781461359524
Kieli
englanti
Paino
310 grammaa
Julkaisupäivä
23.2.2014
Sivumäärä
393