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Ion Implantation and Synthesis of Materials
Tallenna

Ion Implantation and Synthesis of Materials

Ion implantation is one of the key processing steps in silicon integrated circuit technology. This book presents the physics and materials science of ion implantation and ion beam modification of materials.
Painos
Softcover reprint of hardcover 1st ed. 2006
ISBN
9783642062599
Kieli
englanti
Paino
310 grammaa
Julkaisupäivä
12.2.2010
Sivumäärä
263