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Ion Implantation and Synthesis of Materials
Tallenna

Ion Implantation and Synthesis of Materials

sidottu, 2006
englanti
Ion implantation is one of the key processing steps in silicon integrated circuit technology. This book presents the physics and materials science of ion implantation and ion beam modification of materials.
Painos
2006 ed.
ISBN
9783540236740
Kieli
englanti
Paino
446 grammaa
Julkaisupäivä
9.8.2006
Sivumäärä
263