Tallenna
Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets.
- Kirjailija
- María Ángela Pampillón Arce
- Painos
- Softcover reprint of the original 1st ed. 2017
- ISBN
- 9783319882840
- Kieli
- englanti
- Paino
- 310 grammaa
- Sarja
- Springer Theses
- Julkaisupäivä
- 18.5.2018
- Kustantaja
- Springer International Publishing AG
- Sivumäärä
- 164
