Fundamentals of Microelectromechanical Systems (MEMS)

A complete guide to MEMS engineering, fabrication, and applicationsThis comprehensive engineering guide shows, step by step, how to incorporate cutting-edge microelectromechanical (MEMS) technology to enable internet-of-things (IoT) and artificial intelligence (AI) functionality in your designs. Written by an experienced educator and microelectronics expert, Fundamentals of Microelectromechanical Systems (MEMS) clearly explains the latest technologies and methods. Real-world examples, illustrations, and in-depth questions and problems reinforce key topics throughout. Readers will also take a look at the future of MEMS in the workforce and explore MEMS research and development.Coverage includes:Basic microfabricationMicromachiningTransduction principlesRF and optical MEMSMechanics and inertial sensorsThin film properties and SAW/BAW sensorsPressure sensors and microphonesPiezoelectric filmsMaterial properties expressed as tensorMicrofluidic systems and BioMEMSPower MEMSElectronic noises, interface circuits, and oscillators