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Flash Lamp Annealing
Tallenna

Flash Lamp Annealing

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey.

Alaotsikko
From Basics to Applications
Painos
2019 ed.
ISBN
9783030232986
Kieli
englanti
Paino
446 grammaa
Julkaisupäivä
6.8.2019
Sivumäärä
288