
Flash Lamp Annealing
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey.
- Alaotsikko
- From Basics to Applications
- Kirjailija
- Lars Rebohle, Slawomir Prucnal, Denise Reichel
- Painos
- 2019 ed.
- ISBN
- 9783030232986
- Kieli
- englanti
- Paino
- 446 grammaa
- Julkaisupäivä
- 6.8.2019
- Kustantaja
- Springer Nature Switzerland AG
- Sivumäärä
- 288