
Fabrication and Characterization in the Micro-Nano Range
This book shows an update in the field of micro/nano fabrications techniques of two and three dimensional structures as well as ultimate three dimensional characterization methods from the atom range to the micro scale.
- Alaotsikko
- New Trends for Two and Three Dimensional Structures
- Toimittaja
- Fernando A. Lasagni, Andrés F. Lasagni
- Painos
- 2011 ed.
- ISBN
- 9783642267543
- Kieli
- englanti
- Paino
- 310 grammaa
- Julkaisupäivä
- 21.4.2013
- Sivumäärä
- 222