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Epitaxy of Semiconductors
Tallenna

Epitaxy of Semiconductors

The book discusses the structural and electronic properties of strained epitaxial layers, the thermodynamics and kinetics of layer growth, and it describes the major growth techniques: metalorganic vapor-phase epitaxy, molecular-beam epitaxy, and liquid-phase epitaxy.
Alaotsikko
Physics and Fabrication of Heterostructures
Kirjailija
Udo W. Pohl
Painos
Second Edition 2020
ISBN
9783030438715
Kieli
englanti
Paino
310 grammaa
Julkaisupäivä
22.7.2021
Sivumäärä
535