Enabling Technology for MEMS and Nanodevices

Microstructures, electronics, nanotechnology ¿ these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any technological gaps.

Advanced Micro and Nanosystems (AMN) provides cutting-edge reviews and detailed case studies by top authors from science and industry, covering technologies, devices and advanced systems from the micro and nano worlds.

This volume deals with enabling technologies for both micro and nanostructures. The first section, MEMS, begins with an introduction to the challenges and benefits of three-dimensional microstructures as compared to previous, more or less flat structures. An industrial view of the trends in MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, MEMS packaging issues for micro- and nanosystems, HF integrated MEMS resonators and filters, the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes.
The second section, Nanodevices, first tackles nanofluidics with a chapter each on simulation and on structuring and devices, followed by another two chapters on nanosensors featuring carbon nanotubes and CMOS-based DNA sensor arrays, respectively.