
Design and Development of MEMS based Guided Beam Type Piezoelectric Energy Harvester
This book presents device design, layout design, FEM analysis, device fabrication, and packaging and testing of MEMS-based piezoelectric vibration energy harvesters.
- Kirjailija
- Shanky Saxena, Ritu Sharma, B. D. Pant
- Painos
- 2021 ed.
- ISBN
- 9789811606083
- Kieli
- englanti
- Paino
- 310 grammaa
- Julkaisupäivä
- 7.4.2022
- Kustantaja
- SPRINGER VERLAG, SINGAPORE
- Sivumäärä
- 190