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Bonding in Microsystem Technology
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Bonding in Microsystem Technology

Bonding in Microsystem Technology starts with descriptions of terminology, kinds of microsystems and market analysis. This part of the book finishes with examples of applications of anodic bonding in microsystem technology taken from the literature but mainly based on the author’s personal experience.

Kirjailija
Jan A. Dziuban
Painos
Softcover reprint of hardcover 1st ed. 2006
ISBN
9789048171514
Kieli
englanti
Paino
310 grammaa
Julkaisupäivä
25.11.2010
Kustantaja
Springer
Sivumäärä
334