Tallenna
Advanced MEMS/NEMS Fabrication and Sensors
sidottu, 2021
englanti
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications.
- Toimittaja
- Zhuoqing Yang
- Painos
- 2022 ed.
- ISBN
- 9783030797485
- Kieli
- englanti
- Paino
- 446 grammaa
- Julkaisupäivä
- 13.10.2021
- Kustantaja
- Springer Nature Switzerland AG
- Sivumäärä
- 312
