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Tribology Issues and Opportunities in MEMS
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Tribology Issues and Opportunities in MEMS

Engelska
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Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization.
Undertitel
Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9–11 November 1997
Upplaga
Softcover reprint of the original 1st ed. 1998
ISBN
9789401061216
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2012-11-05
Förlag
Springer
Sidor
655