Spara
Surface Engineering
e ion species (Ar+), ion energy (20-44 KeV), substrate 2 temperature (80-550° K), dose rate (100-500 gA cm- ) , residual x 5 9 pressure (5 10- to 5x10- mm Hg) and polar and azimuthal angle of ion incidence {4} reproducible surface morphology (etch pits and pyramids) is achieved on the (11 3 1) specific crystallographic orientation.
- Undertitel
- Surface Modification of Materials
- Redaktör
- R. Kossowsky, S.C. Singhal
- Upplaga
- Softcover reprint of the original 1st ed. 1984
- ISBN
- 9789400962187
- Språk
- Engelska
- Vikt
- 310 gram
- Utgivningsdatum
- 2011-10-15
- Förlag
- Springer
- Sidor
- 764
