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Reduced Thermal Processing for ULSI
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Reduced Thermal Processing for ULSI

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As feature dimensions of integrated circuits shrink, the associated geometrical constraints on junction depth impose severe restrictions on the thermal budget for processing such devices.
Redaktör
R.A. Levy
Upplaga
Softcover reprint of the original 1st ed. 1989
ISBN
9781461278573
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2011-09-30
Sidor
450