Gå direkt till innehållet
Plasma Processing of Semiconductors
Spara

Plasma Processing of Semiconductors

Lägsta pris på PriceRunner
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Redaktör
P.F. Williams
Upplaga
Softcover reprint of the original 1st ed. 1997
ISBN
9789401064866
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2012-10-12
Förlag
Springer
Sidor
613