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Nanoimprint Lithography: An Enabling Process for Nanofabrication
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Nanoimprint Lithography: An Enabling Process for Nanofabrication

Författare:
Engelska
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Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes.
Författare
Weimin Zhou
Upplaga
Softcover Reprint of the Original 1st 2013 ed.
ISBN
9783662510865
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2016-08-23
Sidor
249