Spara
Laser Processing of Thin Films and Microstructures
This text aims at providing a comprehensive and up to date treatment of the new and rapidly expanding field of laser pro cessing of thin films, particularly, though by no means exclu sively, of recent progress in the dielectrics area.
- Undertitel
- Oxidation, Deposition and Etching of Insulators
- Författare
- Ian W. Boyd
- Upplaga
- Softcover reprint of the original 1st ed. 1987
- ISBN
- 9783642831386
- Språk
- Engelska
- Vikt
- 310 gram
- Utgivningsdatum
- 2011-12-15
- Sidor
- 320
