
Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets
This thesis describes the fabrication of metal-insulator-semiconductor (MIS) structures using very high permittivity dielectrics (based on rare earths) grown by high-pressure sputtering from metallic targets.
- Författare
- María Ángela Pampillón Arce
- Upplaga
- 1st ed. 2017
- ISBN
- 9783319666068
- Språk
- Engelska
- Vikt
- 446 gram
- Serie
- Springer Theses
- Utgivningsdatum
- 2017-10-13
- Sidor
- 164
