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Epitaxy

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It covers and discusses in details the most important epitaxial growth techniques, which are currently widely used in basic research as well as in manufacturing processes of devices, namely solid-phase epitaxy, liquid-phase epitaxy, vapor-phase epitaxy, including metal-organic vapor-phase epitaxy and molecular-beam epitaxy.
Undertitel
Physical Principles and Technical Implementation
Upplaga
Softcover reprint of hardcover 1st ed. 2004
ISBN
9783642087370
Språk
Engelska
Vikt
310 gram
Utgivningsdatum
2010-12-01
Sidor
525